Description
From the Dust Jacket
During the past 10 years the driving force of miniaturization in the microelectronics industry has resulted in a consistent decrease in the feature sizes of integrated circuits. Because further device miniaturization is anticipated in the future, more stringent requirements will be placed on contaminants and impurities in the chemicals, materials, and gases that are supplied to the industry. The determination of the role of a particular contaminant during device processing is difficult and miniaturization further complicates the characterization of devices. Thus, new or improved analytical methods will be required as integrated circuit technology moves steadily toward increasing circuit density. This 25-chapter book provides an overview of techniques used in analyzing and characterizing inorganic materials in integrated circuits. It reviews the state of the art of applications of new and mature techniques. Specific techniques discussed include scanning electron microscopy, secondary ion mass spectroscopy. Auger electron spectroscopy, neutron depth profiling, thermal-wave imaging, Fourier transform IR spectrophotometry, activation analysis, and spark source mass spectrography. The book concludes with a chapter discussing the synergism of complementary techniques used in microelectronics processing problem solving. The comprehensive coverage of analysis applied to integrated circuit processing makes this book a valuable resource for chemists, chemical engineers, physicists, materials scientists, and electrical Engineers working in this area. Also, students studying integrated circuit processing will find this book useful as an introduction to techniques as well as resource material.
Publishing Info
Microelectronics Processing edited by Lawrence A. Casper. Published by the American Chemical Society with 1986 copyright. No other printings listed. The ISBN is 0-8412-0934-0. This measures about 9-1/4″ x 6-1/4″ and has 443 pages, ending with the Index.
Condition
The dust jacket shows some storage but is in very good condition for age. Used as an company library book so has DD number on the spine as shown. The boards are in near new condition but for card pocket pasted inside the back cover. The binding is strong with faint backward lean. The pages are in very nice condition with some storage soil on top edges of closed book. No personal names or markings noted, but there is a company library stamp on the bottom of the page edges. From clean, smoke-free home.
Shipping
Generally sent the same day payment arrives. Unless you request otherwise, I will wrap the book in plastic wrap to help protect it from the elements, create a custom-made cardboard box to ship it in, and send via Media Mail with Delivery Confirmation tracking. See the shipping page for the cost to send a two-pound Media Mail package. Insurance is an additional cost as described. I am delighted to combine postage and insurance costs if you purchase more than one item. The second item may travel for free or just a few cents more — so it’s worth taking a look at my other items before you complete your order. .
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RB
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